Results
Conferences 2019
- •Deposition of DLC coatings on metal substrates by using DC and HIPIMS sputtering of C target”, Catalin Vitelaru, Adrian Emil Kiss, Anca Constantina Parau, Mihaela Dinu, Lidia Ruxandra Constantin, Arcadie Sobetkii, Tomas Kubart, poster
- • Industrially relevant DLC coatings on metal substrates by using HIPIMS sputtering coupled with synchronized pulsed biasing” Arcadie Sobetkii, Arcadii Sobetkii, Catalin Vitelaru, Adrian Emil Kiss, Anca Constantina Parau, Tomas Kubart, Rafael Sanchez, poster
- •Synthesis of Diamond-Like Carbon Thin Films by Ionized Sputtering" Tomas Kubart, Catalin Vitelaru, Arcadie Sobetkii, Ulf Helmersson, Rafael Sanchez, Fabio Ferreira, Joao Oliveira, oral presentation
Papers in ISI Journals 2018
Discharge runaway in high power impulse magnetron sputtering of carbon: the effect of gas pressure, composition and target peak voltage, C. Vitelaru, A. Aijaz, A. C. Parau, A. E Kiss, A. Sobetkii, T. Kubart, Journal of Physics D: Applied Physics (2018) https://doi.org/10.1088/1361-6463/aab590
Conferences 2018
Tuning the HiPIMS sputtering process of C target for the deposition of DLC coatings, C. Vitelaru, A. C. Parau, L. R. Constantin, A. E. Kiss, A. Aijaz, T. Kubart, PSE 2018, 17 - 21 September, 2018, Garmisch, Germania – oral presentation
Substrate biasing effects on the mechanical and tribological properties of thick DLC coatings obtained by HiPIMS, A. C. Parau , C. Vitelaru, A. E. Kiss, I. Pana, A. Sobetkii, A. Aijaz, T. Kubart, J. C. Oliveira, PSE 2018, 17 - 21 September, 2018, Garmisch, Germania – poster
Micrometer thick DLC coatings on metal substrates by using HIPIMS sputtering of C target in various gas mixtures, C. Vitelaru, A. E. Kiss, A. C. Parau, M. Dinu, N. C. Zoita, A. Sobetkii, A. Aijaz, T. Kubart, J. C. Oliveira , EMRS 2018 , 17 -22 June 2018, Strasbourg, France – oral presentation
Correlation between substrate ion fluxes and properties of DLC films deposited by DOMS in Ar and Ar + Ne plasmas, F. Ferreira, R. Serra, T. Kubart, C. Vitelaru, A. Cavaleiro and J.C. Oliveira, XV Congreso Nacional de Materiales | I Iberian Meeting on Materials Sicence (CNMAT 2018), July, 4 – 6, 2018, Salamanca, Spain (oral presentation).
Conferences 2017
Transition regions of the Ne-based HiPIMS process used for the deposition of DLC thin films, C. Vitelaru, M. Dinu, A. C. Parau, A. E. Kiss , CIP-MIATEC 2017, 26-30 June 2017, Nice, France (poster)
Reactive sputtering of carbon target under HiPIMPS conditions for the deposition of DLC coatings,C. Vitelaru, M. Dinu, A.C. Parau, L. Constantin, A. Kiss, 17th International Conference on Plasma Physics and Applications - CPPA 2017, 15-20 June 2017, Magurele-Bucharest, Romania (poster)
Reactive magnetron sputtering of oxides, nitrides and oxy-nitrides: from process characterization to tunable thin films, C. Vitelaru, I. Pana, A.C. Parau, N.C. Zoita, A. Kiss, M. Braic, 17th International Conference on Plasma Physics and Applications - CPPA 2017 , 15-20 June 2017, Magurele-Bucharest, Romania – oral presentation
Process dependent structural properties of thin films obtained by hybrid High Power Impulse Magnetron Sputtering (HiPIMS), M. Dinu, C. Vitelaru, M. Braic, User Workshop Rigaku for "SmartLab" , 16 -17 March 2017, Oxford, Anglia – poster
Adherent and hard DLC coatings deposited by HiPIMS in Deep Oscillations Magnetron Sputtering (DOMS) mode, F. Ferreira, A. Aijaz, T. kubart, C. Vitelaru, A. Cavaleiro and J.C. Oliveira, MATERIAS 9-12 April 2017, Aveiro, Portugal (oral presentation).
Adherent and hard DLC coatings deposited by HiPIMS in Deep Oscillations Magnetron Sputtering (DOMS) mode”- F. Ferreira, A. Aijaz, T. kubart, C. Vitelaru, A. Cavaleiro and J.C. Oliveira, “, SVC TechCon 2017 - 60th Annual Technical Conference, April 29-May 4, Providence, USA (oral presentation).
Scientific results
The industrial process was implemented on 3D pieces for deposition of DLC on real pieces provided by the beneficiary of the industrial partner P4-MGM
The coatings on real pieces were evaluated and tested under working conditions and harsh conditions
Temporal characteristics of the pulses were optimized both for laboratory scale and industrial process
HPIMS process was implemented on industrial scale to obtain stable DLC coatings on planar Si and 304L samples, obtaining DLC coatings with up to 30 GPa Hardness and friction coefficient ~0.1
Direct relation between stress values and hardness was established
Gas composition was used for tuning both laboratory and industrial processes
Different interlayer solutions were implemented, adapted for laboratory and industrial processes
The reactive Ne-HiPIMS process was implemented on laboratory scale, and tested for two reactive gases (CH4 and C2H2)
Characterization of reactive Ne-HIPIMS process was performed for both reactive gases and process parameters were identified for deposition hydrogenated DLC films
Thin film characteristics and process stability pointed towards the use of C2H2 as a better choice for reactive process. Substantial deposition rate increase was obtained when using reactive Ne-HiPIMS.
Interlayer solution was implemented for improving the adhesion to both Si and steel substrates
Stable DLC films of 1 micron thickness were obtained and characterized on steel substrates, using different process conditions (reactive processes, Ar and Ar/Ne processes)
Typical characteristic of best performing layers can be summarized as follows: friction coefficient around 0.1, nanoindentation hardness ~25 GPa, critical force higher than 30 N
Pulsed synchronized bias of the substrate was successfully implemented and tested under industrial conditions (in collaboration with industrial partners in the Consortium)
The Ne-HiPIMS process was successfully implemented under laboratory scale conditions
Characterization of Ne-HiPIMS process revealed the process windows parameters to be used in the development phases (gas pressure, peak voltage, pulse duration, Ne content in gas mixture
The “Exploitation and Dissemination plan” was defined in agreement with consortium partners
The website of the project was launched
